Publication Information

Title:
Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
Type:
Conference Proceedings
Info:
2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IACC)
Date:
2015-04-14

Author Information

Name Institution
In Joong KimYonsei University
Yong Hyeon ShinYonsei University
Ilgu YunYonsei University

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: OES
Analysis: OES, Optical Emission Spectroscopy

Substrates

Si(100)

Keywords

Notes

508