Publication Information

Title: Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system

Type: Conference Proceedings

Info: 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IACC)

Date: 2015-04-14

DOI: http://dx.doi.org/10.1109/ICEP-IAAC.2015.7111092

Author Information

Name

Institution

Yonsei University

Yonsei University

Yonsei University

Films

Plasma Al2O3 using Custom

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

OES

OES, Optical Emission Spectroscopy

Unknown

Substrates

Si(100)

Keywords

Notes

508



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