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Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
Type:
Journal
Info:
Journal of Luminescence 145 (2014) 307 - 311
Date:
2013-07-31
Author Information
| Name | Institution |
|---|---|
| Jeong-Gyu Song | Yonsei University |
| Jusang Park | Yonsei University |
| Jaehong Yoon | Yonsei University |
| Hwangje Woo | Yonsei University |
| Kyungyong Ko | Yonsei University |
| Taeyoon Lee | Yonsei University |
| Sung-Hwan Hwang | Yonsei University |
| Jae Min Myoung | Yonsei University |
| Keewon Kim | Samsung Advanced Institute of Technology |
| Youngman Jang | Samsung Advanced Institute of Technology |
| Kwangseok Kim | Samsung Advanced Institute of Technology |
| Hyungjun Kim | Yonsei University |
Films
Plasma MgO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Microstructure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Substrates
| Si(001) |
| SiO2 |
| ZnO |
Notes
| 600 |