Publication Information

Title:
Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
Type:
Journal
Info:
Journal of Luminescence 145 (2014) 307 - 311
Date:
2013-07-31

Author Information

Name Institution
Jeong-Gyu SongYonsei University
Jusang ParkYonsei University
Jaehong YoonYonsei University
Hwangje WooYonsei University
Kyungyong KoYonsei University
Taeyoon LeeYonsei University
Sung-Hwan HwangYonsei University
Jae Min MyoungYonsei University
Keewon KimSamsung Advanced Institute of Technology
Youngman JangSamsung Advanced Institute of Technology
Kwangseok KimSamsung Advanced Institute of Technology
Hyungjun KimYonsei University

Films

Plasma MgO


Thermal MgO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Microstructure
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence

Substrates

Si(001)
SiO2
ZnO

Keywords

Passivation

Notes

600