Plasma ALD, LLC Consulting


2024 Year in Review


The publication database currently has 1749 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
258 Characteristics
99 Theses
5415 Authors

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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Quros Plus 150 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Quros Plus 150 hardware returned 9 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
2Plasma-enhanced atomic layer deposition of Co on metal surfaces
3Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
4Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
5Plasma enhanced atomic layer deposition of Co thin film on τ-MnAl for effective magnetic exchange coupling and enhanced energy products
6Plasma-Enhanced Atomic Layer Deposition of Ni
7Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
8Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
9Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor

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