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Search 1536 plasma ALD publications by:
Publication Information
Title:
Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
Small 2008, 4, No. 12, 2247-2254
Date:
2008-10-30
Author Information
Name | Institution |
---|---|
Han-Bo-Ram Lee | Pohang University of Science and Technology (POSTECH) |
Gil-Ho Gu | Pohang University of Science and Technology (POSTECH) |
J. Y. Son | Pohang University of Science and Technology (POSTECH) |
Chan Gyung Park | Pohang University of Science and Technology (POSTECH) |
Hyungjun Kim | Pohang University of Science and Technology (POSTECH) |
Films
Plasma Co
Plasma Ni
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device
Substrates
Si(001) |
SiO2 |
Keywords
Notes
1017 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |