Publication Information

Title: Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition

Type: Journal

Info: Small 2008, 4, No. 12, 2247-2254

Date: 2008-10-30

DOI: http://dx.doi.org/10.1002/smll.200801074

Author Information

Name

Institution

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Pohang University of Science and Technology (POSTECH)

Films

Plasma Co using Quros Plus 150

Deposition Temperature Range N/A

1277-43-6

7664-41-7

7803-62-5

1333-74-0

Plasma Ni using Quros Plus 150

Deposition Temperature Range N/A

942311-35-5

7664-41-7

7803-62-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Unknown

Images

SEM, Scanning Electron Microscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Microstructure

TEM, Transmission Electron Microscope

JEOL 2100F

Images

TEM, Transmission Electron Microscope

JEOL 2100F

Chemical Composition, Impurities

ELS, EELS, Electron Energy Loss Spectroscopy

JEOL 2100F

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

Magnetic Properties

SQUID, Superconducting Quantum Interference Device

Quantum Design MPMS

Substrates

Si(001)

SiO2

Keywords

Notes

1017



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