Han-Bo-Ram Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Han-Bo-Ram Lee returned 21 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
2Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
3Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
4Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
5Very high frequency plasma reactant for atomic layer deposition
6Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
7Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
8In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
9Plasma-Enhanced Atomic Layer Deposition of Ni
10Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
11Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
12Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
13Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
14A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
15Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
16Formation of Ni silicide from atomic layer deposited Ni
17Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
18Plasma-enhanced atomic layer deposition of Co on metal surfaces
19High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
20Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
21Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode