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Han-Bo-Ram Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Han-Bo-Ram Lee returned 21 record(s).

NumberTitle
1A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
2Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
3High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
4Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
5Plasma-enhanced atomic layer deposition of Co on metal surfaces
6Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
7Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
8Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
9Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
10Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
11Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
12Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
13In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
14Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
15Very high frequency plasma reactant for atomic layer deposition
16Plasma-Enhanced Atomic Layer Deposition of Ni
17Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
18Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
19Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
20Formation of Ni silicide from atomic layer deposited Ni
21Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode