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Han-Bo-Ram Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Han-Bo-Ram Lee returned 21 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
2Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
3A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
4Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
5High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
6Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
7Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
8Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
9In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
10Plasma-enhanced atomic layer deposition of Co on metal surfaces
11Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
12Plasma-Enhanced Atomic Layer Deposition of Ni
13Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
14Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
15Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
16Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
17Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
18Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
19Formation of Ni silicide from atomic layer deposited Ni
20Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
21Very high frequency plasma reactant for atomic layer deposition