Han-Bo-Ram Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Han-Bo-Ram Lee returned 21 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Very high frequency plasma reactant for atomic layer deposition
2A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
3Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
4Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
5In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
6Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
7Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
8Formation of Ni silicide from atomic layer deposited Ni
9Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
10Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
11Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
12Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
13Plasma-Enhanced Atomic Layer Deposition of Ni
14Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
15Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
16Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
17Plasma-enhanced atomic layer deposition of Co on metal surfaces
18Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
19High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
20Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
21Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor