Publication Information

Title:
Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
Type:
Journal
Info:
Sensors and Actuators B 147 (2010) 653-659
Date:
2010-03-27

Author Information

Name Institution
Dai-Hong KimSeoul National University
Won-Sik KimSeoul National University
Sung Bo LeeSeoul National University
Seong-Hyeon HongSeoul National University

Films

Plasma SnO2


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: X-ray Pole Figure

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Gas Sensing
Analysis: Custom

Substrates

TiO2(100)
TiO2(001)
TiO2(110)
TiO2(101)

Keywords

Sensors

Notes

600C post deposition anneal.
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