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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Seong-Hyeon Hong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seong-Hyeon Hong returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
2Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
3Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations