Publication Information

Title:
Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
Type:
Conference Proceedings
Info:
Mat. Res. Soc. Symp. Proc. Vol. 685E
Date:
2001-01-01

Author Information

Name Institution
Won-Jae LeeElectronics and Telecommunication Research Institute, (ETRI)
Chang-Ho ShinElectronics and Telecommunication Research Institute, (ETRI)
In-Kyu YouElectronics and Telecommunication Research Institute, (ETRI)
Il-Suk YangElectronics and Telecommunication Research Institute, (ETRI)
Sang-Ouk RyuElectronics and Telecommunication Research Institute, (ETRI)
Byoung-Gon YuElectronics and Telecommunication Research Institute, (ETRI)
Kyoung-Ik ChoElectronics and Telecommunication Research Institute, (ETRI)
Soon-Gil YoonChungnam National University
Chun-Su LeeGenitech Co., Ltd.

Films

Plasma SrTa2O6

Hardware used: Custom


CAS#: 7782-44-7

Film/Plasma Properties

Characteristic: Unknown
Analysis: Anneal

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Dissipation Factors
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry

Substrates

Pt

Keywords

Notes

8A per cycle, perhaps CVD component
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