Your search for plasma enhanced atomic layer deposition publications authored by Chun-Su Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)|
|2||Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN|
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