2021 Year in Review

The publication database currently has 1628 entries.

Search from:

272 Precursors and Plasma Gases

251 Film and Plasma Characteristics

90 Theses

Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)

ALD Links
Contact Us

Recent Database Additions

Effect of atomic layer plasma treatment on TALD-ZrO₂ film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation

Search 1628 plasma ALD publications by:

203 Films Compositions

272 Precursors and Plasma Gases

77 Deposition Hardwares

251 Film and Plasma Characteristics

Chun-Su Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chun-Su Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Electrical properties of SrTa₂O₆ thin films by plasma enhanced atomic layer deposition (PEALD)
2	Plasma Enhanced Atomic Layer Deposition of Al₂O₃ and TiN