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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Chun-Su Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chun-Su Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
2Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN