SrTa₂O₆ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SrTa₂O₆ films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD)
2	Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor

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