Name

Institution

Yong Ju Lee

Korea Advanced Institute of Science and Technology

Sang-Won Kang

Korea Advanced Institute of Science and Technology

Plasma Al using Custom

Deposition Temperature = 250C

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH₃)₃, AlMe₃, Al₂(CH₃)₆, Al₂Me₆

75-24-1

Where to buy precursor

Hydrogen, H₂

1333-74-0

Characteristic

Analysis

Diagnostic

Thickness

Profilometry

Tencor Alpha-Step Profilometer

Thickness

TEM, Transmission Electron Microscope

Unknown

Resistivity, Sheet Resistance

Four-point Probe

Unknown

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

Unknown

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Chemical Composition, Impurities

AES, Auger Electron Spectroscopy

Unknown

TiN

Interconnect

Description of why TMA forms dimer.

TMA vapor pressure = 1117 Pa at room T.

Pyrolytic decomposition temperature >350C with references.

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