Your search for plasma enhanced atomic layer deposition publications discussing Al films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma|
|2||Radical Enhanced Atomic Layer Deposition of Metals and Oxides|
|3||Study on the characteristics of aluminum thin films prepared by atomic layer deposition|
|4||Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN|
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