Al Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Al films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study on the characteristics of aluminum thin films prepared by atomic layer deposition
2Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
3Radical Enhanced Atomic Layer Deposition of Metals and Oxides
4Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma