November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Yong Ju Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong Ju Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Antioxidation properties of Ti_0.83Al_0.17N prepared using plasma-enhanced atomic layer deposition
2	Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
3	Controlling the composition of Ti_1-xAl_xN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
4	Formation of aluminum nitride thin films as gate dielectrics on Si(100)
5	Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
6	Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH₃-Ar-H₂ plasma treatment for capacitor electrodes
7	Study on the characteristics of aluminum thin films prepared by atomic layer deposition
8	Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN