Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
Type:
Journal
Info:
RSC Adv., 2016, 6, 68515-68524
Date:
2016-07-04
Author Information
| Name | Institution |
|---|---|
| Luchana L. Yusup | Sejong University |
| Jae-Min Park | Sejong University |
| Yong-Ho Noh | Sejong University |
| Sun-Jae Kim | Sejong University |
| Won-Jun Lee | Sejong University |
| Sora Park | Kyung Hee University |
| Young-Kyun Kwon | Kyung Hee University |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Substrates
| Silicon |
Notes
| 963 |