Luchana L. Yusup Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Luchana L. Yusup returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
2Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride