Hexachlorodisilane, Si2Cl6, CAS# 13465-77-5
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Entegris | 🇺🇸 | HCDS-HP |
| 2 | EpiValence | 🇬🇧 | Hexachloro disilane |
| 3 | Gelest | 🇺🇸 | Hexachlorodisilane |
| 4 | Ereztech | 🇺🇸 | Hexachlorodisilane |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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