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Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics|
|2||Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma|
|3||Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride|
|4||Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics|
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