Hexachlorodisilane, Si2Cl6, CAS# 13465-77-5

Where to buy

NumberVendorLink
1EreztechHexachlorodisilane (99.99%-Si)
2EntegrisHCDS-HP
3GelestHexachlorodisilane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer epitaxy of Si on Ge(100) using Si2Cl6 and atomic hydrogen
2Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
3Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
4Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
5Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics


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