Hexachlorodisilane, Si2Cl6, CAS# 13465-77-5

Where to buy

NumberVendorLink
1EreztechHexachlorodisilane (99.99%-Si)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
2Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
3Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
4Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics


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