Hexachlorodisilane, Si2Cl6, CAS# 13465-77-5

Where to buy

NumberVendorRegionLink
1GelestπŸ‡ΊπŸ‡ΈHexachlorodisilane
2Yoodatech (Shanghai) Co., LtdHexachlorodisilane, Si2Cl6 - contact maggie@yoodatech.com
3EreztechπŸ‡ΊπŸ‡ΈHexachlorodisilane
4EntegrisπŸ‡ΊπŸ‡ΈHCDS-HP
5DOCK/CHEMICALSπŸ‡©πŸ‡ͺHexachlorodisilane

www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.


Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
2Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
3Atomic layer epitaxy of Si on Ge(100) using Si2Cl6 and atomic hydrogen
4Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
5Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
6Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics