Sun-Jae Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sun-Jae Kim returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride |