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Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
Self-limiting diamond growth from alternating CFx and H fluxes
Sub-10-nm ferroelectric Gd-doped HfO2 layers
Where to buy Hexachlorodisilane, Si2Cl6 CAS# 13465-77-5
Hexachlorodisilane, Si2Cl6 CAS# 13465-77-5 is available from the following source(s):
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | EpiValence | 🇬🇧 | Hexachloro disilane |
| 2 | Ereztech | 🇺🇸 | Hexachlorodisilane |
| 3 | Gelest | 🇺🇸 | Hexachlorodisilane |
| 4 | Entegris | 🇺🇸 | HCDS-HP |
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