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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Where to buy Hexachlorodisilane, Si2Cl6 CAS# 13465-77-5
Hexachlorodisilane, Si2Cl6 CAS# 13465-77-5 is available from the following source(s):
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | EpiValence | 🇬🇧 | Hexachloro disilane |
| 2 | Ereztech | 🇺🇸 | Hexachlorodisilane |
| 3 | Gelest | 🇺🇸 | Hexachlorodisilane |
| 4 | Entegris | 🇺🇸 | HCDS-HP |
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