2022 Year in Review
August 2023 Stats
The publication database currently has 1695 entries.
210
Films
283
Precursors
78
Dep Hardware Sets
255
Characteristics
96
Theses
5204
Authors
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2021 Year in Review
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Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Gallium nitride thin films by microwave plasma-assisted ALD
Ferroelectricity of Hf
x
Zr
1-x
O
2
thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Fixed-Gap Tunnel Junction for Reading DNA Nucleotides
Type:
Journal
Info:
ACS Nano, 2014, 8 (12), pp 11994-12003
Date:
2014-11-07
DOI:
http://dx.doi.org/10.1021/nn505356g
Author Information
Name
Institution
Pei Pang
Arizona State University
Films
Plasma
Al
2
O
3
Hardware used:
Custom
DMAI, dimethylaluminum isopropoxide, Me
2
Al(O-i-Pr)
3
CAS#: 6063-89-4
Where to buy precursor
O
2
, Oxygen
CAS#: 7782-44-7
Film/Plasma Properties
Substrates
Notes
211