Publication Information

Title:
Atmospheric pressure plasma enhanced spatial ALD of silver
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 33, 01A131 (2015)
Date:
2014-11-13

Author Information

Name Institution
Fieke J. van den BrueleTNO
Mireille SmetsTNO
Andrea IlliberiTNO
Yves CreyghtonTNO
Pascal BuskensTNO
Fred RoozeboomTNO
Paul PoodtTNO

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Optical Properties
Analysis: Ellipsometry

Substrates

Silicon

Keywords

Atmospheric pressure deposition

Notes

Surface Dielectric Barrier Discharge (SDBD) plasma used.
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