Publication Information

Title: Atmospheric pressure plasma enhanced spatial ALD of silver

Type: Journal

Info: Journal of Vacuum Science & Technology A 33, 01A131 (2015)

Date: 2014-11-13

DOI: http://dx.doi.org/10.1116/1.4902561

Author Information

Name

Institution

TNO

TNO

TNO

TNO

TNO

TNO

TNO

Films

Plasma Ag using Custom

Deposition Temperature Range N/A

165461-74-5

7727-37-9

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Profilometry

Dektak

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Microstructure

TEM, Transmission Electron Microscope

Unknown

Resistivity, Sheet Resistance

Four-point Probe

Unknown

Images

SEM, Scanning Electron Microscopy

Unknown

Optical Properties

Ellipsometry

J.A. Woollam M-2000

Substrates

Silicon

Keywords

Atmospheric pressure deposition

Notes

Surface Dielectric Barrier Discharge (SDBD) plasma used.

140



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