Atmospheric pressure plasma enhanced spatial ALD of silver
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 33, 01A131 (2015)
Date:
2014-11-13
Author Information
| Name | Institution |
|---|---|
| Fieke J. van den Bruele | TNO |
| Mireille Smets | TNO |
| Andrea Illiberi | TNO |
| Yves Creyghton | TNO |
| Pascal Buskens | TNO |
| Fred Roozeboom | TNO |
| Paul Poodt | TNO |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Profilometry
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Optical Properties
Analysis: Ellipsometry
Substrates
| Silicon |
Notes
| Surface Dielectric Barrier Discharge (SDBD) plasma used. |
| 140 |