Paul Poodt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul Poodt returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Patterned deposition by plasma enhanced spatial atomic layer deposition
2Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
3Atmospheric pressure plasma enhanced spatial ALD of silver
4Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells