Paul Poodt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Paul Poodt returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Patterned deposition by plasma enhanced spatial atomic layer deposition
2Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
3Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
4Atmospheric pressure plasma enhanced spatial ALD of silver