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Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
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Publication Information
Title:
Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition
Type:
Journal
Info:
JOURNAL OF APPLIED PHYSICS 115, 073502 (2014)
Date:
2014-02-05
Author Information
| Name | Institution |
|---|---|
| Hyunsoo Jung | Hanyang University |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
| 201 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
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| Mauritius C. M. (Richard) van de Sanden |
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