Publication Information

Title:
Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition
Type:
Journal
Info:
JOURNAL OF APPLIED PHYSICS 115, 073502 (2014)
Date:
2014-02-05

Author Information

Name Institution
Hyunsoo JungHanyang University

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

Keywords

Notes

201