Publication Information

Title: Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects

Type: Journal

Info: J. Vac. Sci. Technol. A, Vol. 35, No. 6, Nov/Dec 2017

Date: 2017-07-21

DOI: http://dx.doi.org/10.1116/1.4997421

Author Information

Name

Institution

University of Maryland

Arizona State University

Arizona State University

Arizona State University

Arizona State University

Films

Plasma Al2O3 using Custom

Deposition Temperature = 155C

6063-89-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Raman Spectra

Raman Spectroscopy

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Substrates

Graphene

Keywords

Notes

1138



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