Publication Information

Title:
Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
Type:
Journal
Info:
J. Vac. Sci. Technol. A, Vol. 35, No. 6, Nov/Dec 2017
Date:
2017-07-21

Author Information

Name Institution
Christie J. TrimbleUniversity of Maryland
Trevor Van EngelhovenArizona State University
Anna M. ZaniewskiArizona State University
Manpuneet K. BenipalArizona State University
Robert J. NemanichArizona State University

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Graphene

Keywords

Notes

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