Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
Type:
Journal
Info:
J. Vac. Sci. Technol. A, Vol. 35, No. 6, Nov/Dec 2017
Date:
2017-07-21
Author Information
| Name | Institution |
|---|---|
| Christie J. Trimble | University of Maryland |
| Trevor Van Engelhoven | Arizona State University |
| Anna M. Zaniewski | Arizona State University |
| Manpuneet K. Benipal | Arizona State University |
| Robert J. Nemanich | Arizona State University |
Films
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
| Graphene |
Notes
| 1138 |