Your search for plasma enhanced atomic layer deposition publications discussing InN films returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer epitaxy for quantum well nitride-based devices|
|2||Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy|
|3||Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy|
|4||Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition|
|5||Perspectives on future directions in III-N semiconductor research|
|6||Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods|
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