The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films

Type:
Journal
Info:
J. Phys. Chem. C, 2019, 123 (42), pp 25691-25700
Date:
2019-09-26
DOI:
http://dx.doi.org/10.1021/acs.jpcc.9b07005

Author Information

Name Institution
Polla RoufLinköping University
Nathan J. O'BrienLinköping University
Karl RönnbyLinköping University
Rouzbeh SamiiLinköping University
Ivan G. IvanovLinköping University
Lars OjamäeLinköping University
Henrik PedersenLinköping University

Films

Plasma InN

Hardware used: Picosun R200
tris(N,N-dimethyl-N',N''-diisoproprylguanidinato)indium(III)
CAS#: 0-0-0
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 200C

Plasma InN

Hardware used: Picosun R200
tris(N,N'-diisopropylamidinato)indium(III)
CAS#: 0-0-0
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature Range = 200-380C

Plasma InN

Hardware used: Picosun R200
tris(N,N'-diisopropylformamidinato)indium(III)
CAS#: 0-0-0
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature Range = 190-300C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: LEO 1550

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: LEO 1550

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy
Diagnostic: -

Substrates

Si(100)

Notes

1403