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Ivan G. Ivanov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan G. Ivanov returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
2Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition
3Atomic layer deposition of InN using trimethylindium and ammonia plasma
4The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films