Your search for plasma enhanced atomic layer deposition publications discussing AlInN films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer epitaxy for quantum well nitride-based devices|
|2||Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures|
|3||Perspectives on future directions in III-N semiconductor research|
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