AlInN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlInN films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
2Atomic layer epitaxy for quantum well nitride-based devices
3Perspectives on future directions in III-N semiconductor research