Search 1628 plasma ALD publications by:
Search 1628 plasma ALD publications by:
AlF Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing AlF films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma |
2 | Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma |