The publication database currently has 1562 entries.
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194 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
242 Film and Plasma Characteristics
83 Theses
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AlF Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing AlF films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |