PtO2 Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing PtO2 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Remote Plasma ALD of Platinum and Platinum Oxide Films |
| 2 | Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films |