PtO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing PtO2 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Remote Plasma ALD of Platinum and Platinum Oxide Films
2Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films


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