PtO2 Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing PtO2 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Remote Plasma ALD of Platinum and Platinum Oxide Films|
|2||Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films|