Ir Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ir films returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
2Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
3Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
4High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
5Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
6Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
7Systematic efficiency study of line-doubled zone plates
8Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates