Ir Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ir films returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
2High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
3Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
4Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
5Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
6Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
7Systematic efficiency study of line-doubled zone plates
8Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
9Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer