Your search for plasma enhanced atomic layer deposition publications discussing Ir films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds|
|2||Systematic efficiency study of line-doubled zone plates|
|3||TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition|
© 2014-2018 plasma-ald.com