Publication Information

Title:
Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
Type:
Journal
Info:
J. Synchrotron Rad. (2020). 27
Date:
2020-02-07

Author Information

Name Institution
Viktoria YurgensPaul Scherrer Institut
Frieder KochPaul Scherrer Institut
Mario ScheelSynchrotron SOLEIL
Timm WeitkampSynchrotron SOLEIL
Christian DavidPaul Scherrer Institut

Films

Plasma Ir


Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Substrates

Si3N4
HSQ, Hydrogen SilsesQuioxane

Keywords

Notes

Deposition details assumed from Marschall reference.
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