Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
Type:
Journal
Info:
J. Synchrotron Rad. (2020). 27
Date:
2020-02-07
Author Information
| Name | Institution |
|---|---|
| Viktoria Yurgens | Paul Scherrer Institut |
| Frieder Koch | Paul Scherrer Institut |
| Mario Scheel | Synchrotron SOLEIL |
| Timm Weitkamp | Synchrotron SOLEIL |
| Christian David | Paul Scherrer Institut |
Films
Plasma Ir
Film/Plasma Properties
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Si3N4 |
| HSQ, Hydrogen SilsesQuioxane |
Notes
| Deposition details assumed from Marschall reference. |
| 1465 |