Ir(acac)3, Iridium acetylacetonate, CAS# 15635-87-7

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
2Systematic efficiency study of line-doubled zone plates


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