Publication Information

Title:
Systematic efficiency study of line-doubled zone plates
Type:
Journal
Info:
Microelectronic Engineering 177 (2017) 25 - 29
Date:
2017-01-17

Author Information

Name Institution
F. MarschallPaul Scherrer Institut
J. Vila-ComamalaPaul Scherrer Institut
Vitaliy A. GuzenkoPaul Scherrer Institut
Christian DavidPaul Scherrer Institut

Films

Plasma Ir


Film/Plasma Properties

Substrates

HSQ, Hydrogen SilsesQuioxane
Si3N4

Keywords

Notes

1035