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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Vitaliy A. Guzenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vitaliy A. Guzenko returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
2Systematic efficiency study of line-doubled zone plates