Christian David Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christian David returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
2Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
3Systematic efficiency study of line-doubled zone plates
4High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds