Publication Information

Title:
High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
Type:
Journal
Info:
Journal of Vacuum Science & Technology B 34, 061804 (2016)
Date:
2016-10-28

Author Information

Name Institution
Chang-Sheng LeeA*STAR (Agency for Science, Technology and Research)
Yeong-Yuh LeeA*STAR (Agency for Science, Technology and Research)
Karen S. L. ChongA*STAR (Agency for Science, Technology and Research)
Li WangEulitha AG
Christian DaisEulitha AG
Francis ClubeEulitha AG
Harun H. SolakEulitha AG
Istvan MohacsiPaul Scherrer Institut
Christian DavidPaul Scherrer Institut
Roger BischofbergermicroSWISS AG

Films

Plasma Ir


Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Substrates

Silicon

Keywords

Imprint Lithography

Notes

860