High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
Type:
Journal
Info:
Journal of Vacuum Science & Technology B 34, 061804 (2016)
Date:
2016-10-28
Author Information
| Name | Institution |
|---|---|
| Chang-Sheng Lee | A*STAR (Agency for Science, Technology and Research) |
| Yeong-Yuh Lee | A*STAR (Agency for Science, Technology and Research) |
| Karen S. L. Chong | A*STAR (Agency for Science, Technology and Research) |
| Li Wang | Eulitha AG |
| Christian Dais | Eulitha AG |
| Francis Clube | Eulitha AG |
| Harun H. Solak | Eulitha AG |
| Istvan Mohacsi | Paul Scherrer Institut |
| Christian David | Paul Scherrer Institut |
| Roger Bischofberger | microSWISS AG |
Films
Plasma Ir
Film/Plasma Properties
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Silicon |
Notes
| 860 |