Frieder Koch Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Frieder Koch returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses|
|2||Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates|