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An economical, compact inductively coupled plasma source.

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Frieder Koch Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Frieder Koch returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
2Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses