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2024 Year in Review


The publication database currently has 1749 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
258 Characteristics
99 Theses
5415 Authors

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GaP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GaP films returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of PE-ALD of GaP on the Silicon Wafers Quality
2Thin film GaP for solar cell application
3Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
4Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
5Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
6Capacitance characterization of GaP/n-Si structures grown by PE-ALD
7Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
8Study of GaP/Si Heterojunction Solar Cells
9Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
10n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
11Low temperature plasma enhanced deposition of GaP films on Si substrate

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