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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
Type:
Conference Proceedings
Info:
Journal of Physics: Conf. Series 1038 (2018) 012108
Date:
2018-06-01
Author Information
| Name | Institution |
|---|---|
| Alexander V. Uvarov | St. Petersburg Academic University |
| Alexander S. Gudovskikh | St. Petersburg Academic University |
Films
Plasma GaP
Film/Plasma Properties
Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Substrates
Keywords
Notes
| 1467 |