Publication Information

Title:
Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
Type:
Conference Proceedings
Info:
Journal of Physics: Conf. Series 1038 (2018) 012108
Date:
2018-06-01

Author Information

Name Institution
Alexander V. UvarovSt. Petersburg Academic University
Alexander S. GudovskikhSt. Petersburg Academic University

Films


Film/Plasma Properties

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy

Substrates

Keywords

Notes

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