Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
Type:
Conference Proceedings
Info:
Journal of Physics: Conf. Series 1038 (2018) 012108
Date:
2018-06-01
Author Information
Name | Institution |
---|---|
Alexander V. Uvarov | St. Petersburg Academic University |
Alexander S. Gudovskikh | St. Petersburg Academic University |
Films
Plasma GaP
Film/Plasma Properties
Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Substrates
Keywords
Notes
1467 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |