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Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
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Publication Information
Title:
Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
Type:
Conference Proceedings
Info:
Journal of Physics: Conf. Series 1038 (2018) 012108
Date:
2018-06-01
Author Information
| Name | Institution |
|---|---|
| Alexander V. Uvarov | St. Petersburg Academic University |
| Alexander S. Gudovskikh | St. Petersburg Academic University |
Films
Plasma GaP
Film/Plasma Properties
Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Substrates
Keywords
Notes
| 1467 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |