Alexander V. Uvarov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander V. Uvarov returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature plasma enhanced deposition of GaP films on Si substrate
2Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
3n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
4Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
5Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
6Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
7Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD