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Publication Information
Title:
Low temperature plasma enhanced deposition of GaP films on Si substrate
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 36, 021302 (2018)
Date:
2017-11-13
Author Information
Name | Institution |
---|---|
Alexander S. Gudovskikh | St. Petersburg Academic University |
Ivan A. Morozov | St. Petersburg Academic University |
Alexander V. Uvarov | St. Petersburg Academic University |
Dmitry A. Kudryashov | St. Petersburg Academic University |
E.V. Nikitina | St. Petersburg Academic University |
Anton S. Bukatin | St. Petersburg Academic University |
Vladimir N. Nevedomskiy | Ioffe Institute |
Jean-Paul Kleider | GeePs Group of electrical engineering - Paris |
Films
Plasma GaP
Film/Plasma Properties
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Substrates
Si(001) |
Keywords
Notes
1098 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |