PH3, Phospine, Phosphane, CAS# 7803-51-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
2Capacitance characterization of GaP/n-Si structures grown by PE-ALD
3Influence of PE-ALD of GaP on the Silicon Wafers Quality
4Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
5n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
6Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
7Thin film GaP for solar cell application
8Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
9Low temperature plasma enhanced deposition of GaP films on Si substrate
10Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
11Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
12Study of GaP/Si Heterojunction Solar Cells
13Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition