PH3, Phospine, Phosphane, CAS# 7803-51-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature plasma enhanced deposition of GaP films on Si substrate
2Influence of PE-ALD of GaP on the Silicon Wafers Quality
3Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
4Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
5Study of GaP/Si Heterojunction Solar Cells
6Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
7Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
8Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
9Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
10Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
11n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
12Thin film GaP for solar cell application
13Capacitance characterization of GaP/n-Si structures grown by PE-ALD