Ivan A. Morozov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan A. Morozov returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of PE-ALD of GaP on the Silicon Wafers Quality
2Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
3Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
4Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
5Low temperature plasma enhanced deposition of GaP films on Si substrate
6n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
7Study of GaP/Si Heterojunction Solar Cells
8Thin film GaP for solar cell application