2022 Year in Review

February 2023 Stats


The publication database currently has 1673 entries.
204 Films
279 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5136 Authors

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2021 Year in Review
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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes

Ivan A. Morozov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan A. Morozov returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thin film GaP for solar cell application
2Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
3Influence of PE-ALD of GaP on the Silicon Wafers Quality
4n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
5Study of GaP/Si Heterojunction Solar Cells
6Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
7Low temperature plasma enhanced deposition of GaP films on Si substrate
8Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD

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