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July 2022 Top Searches

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The publication database currently has 1636 entries.
203 Films Compositions
274 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
91 Theses
5041 Authors

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Recent Database Additions
Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene Electron-enhanced atomic layer deposition of silicon thin films at room temperature
Search 1636 plasma ALD publications by:
203 Films Compositions
274 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Ivan A. Morozov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan A. Morozov returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of PE-ALD of GaP on the Silicon Wafers Quality
2Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
3Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
4Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
5Low temperature plasma enhanced deposition of GaP films on Si substrate
6n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
7Study of GaP/Si Heterojunction Solar Cells
8Thin film GaP for solar cell application

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