I.A. Morozov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by I.A. Morozov returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of PE-ALD of GaP on the Silicon Wafers Quality
2Low temperature plasma enhanced deposition of GaP films on Si substrate
3n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
4Study of GaP/Si Heterojunction Solar Cells
5Thin film GaP for solar cell application


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