Ivan A. Morozov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan A. Morozov returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
2Thin film GaP for solar cell application
3Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
4Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
5Low temperature plasma enhanced deposition of GaP films on Si substrate
6Study of GaP/Si Heterojunction Solar Cells
7n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
8Influence of PE-ALD of GaP on the Silicon Wafers Quality