Vladimir N. Nevedomskiy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vladimir N. Nevedomskiy returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low temperature plasma enhanced deposition of GaP films on Si substrate
2Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation