2022 Year in Review

May 2023 Stats


The publication database currently has 1686 entries.
208 Films
282 Precursors
78 Dep Hardware Sets
254 Characteristics
93 Theses
5172 Authors

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2021 Year in Review
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Recent Database Additions
Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis Experimental and theoretical determination of the role of ions in atomic layer annealing Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature

Dmitry A. Kudryashov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dmitry A. Kudryashov returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
2Low temperature plasma enhanced deposition of GaP films on Si substrate
3Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
4n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
5Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
6Influence of PE-ALD of GaP on the Silicon Wafers Quality
7Study of GaP/Si Heterojunction Solar Cells
8Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
9Thin film GaP for solar cell application

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