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Alexander S. Gudovskikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander S. Gudovskikh returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Capacitance characterization of GaP/n-Si structures grown by PE-ALD
2Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
3Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
4Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
5Low temperature plasma enhanced deposition of GaP films on Si substrate
6Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
7Study of GaP/Si Heterojunction Solar Cells
8Influence of PE-ALD of GaP on the Silicon Wafers Quality
9Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
10Thin film GaP for solar cell application
11Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
12n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD