Alexander S. Gudovskikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander S. Gudovskikh returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study of GaP/Si Heterojunction Solar Cells
2n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
3Low temperature plasma enhanced deposition of GaP films on Si substrate
4Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
5Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
6Influence of PE-ALD of GaP on the Silicon Wafers Quality
7Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
8Capacitance characterization of GaP/n-Si structures grown by PE-ALD
9Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
10Thin film GaP for solar cell application
11Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
12Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition