Alexander S. Gudovskikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander S. Gudovskikh returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Capacitance characterization of GaP/n-Si structures grown by PE-ALD
2Thin film GaP for solar cell application
3Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
4Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
5Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
6Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
7Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
8Study of GaP/Si Heterojunction Solar Cells
9Low temperature plasma enhanced deposition of GaP films on Si substrate
10n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
11Influence of PE-ALD of GaP on the Silicon Wafers Quality
12Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD