Alexander S. Gudovskikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander S. Gudovskikh returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
2Thin film GaP for solar cell application
3Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
4n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
5Study of GaP/Si Heterojunction Solar Cells
6Capacitance characterization of GaP/n-Si structures grown by PE-ALD
7Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
8Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
9Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
10Low temperature plasma enhanced deposition of GaP films on Si substrate
11Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
12Influence of PE-ALD of GaP on the Silicon Wafers Quality