GeSbTe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GeSbTe films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
2Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
3GeSbTe deposition for the PRAM application