IGZO Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing IGZO films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | High-density plasma etching characteristics of indium-gallium-zinc oxide thin films in CF4/Ar plasma |