Your search for plasma enhanced atomic layer deposition publications discussing TiC films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material|
|2||Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization|
|3||Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition|
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