SiCOH Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SiCOH films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Carbon content control of silicon oxycarbide film with methane containing plasma
2Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
3Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition